Vertically well-aligned ZnO nanorods on Si substrates were prepared by a two-step chemical bath deposition method. The structure and optical properties of the grown ZnO nanorods were investigated by Raman and photoluminescence spectroscopy. The results showed that after an annealing treatment at around 500 degrees C in air atmosphere, the crystal structure and optical properties became much better due to the decrease in surface defects. The resonant Raman measurements excited by 351.1 nm not only revealed that the surface defects play a significant role in the as-grown sample, which was supported by low temperature time-resolved photoluminescence measurements, but also suggested that the strong intensity increase in some Raman scatterings was due to both outgoing resonant Raman scattering effect and deep level defect scattering contribution for ZnO nanorods annealed from 500 to 700 degrees C.
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